Single-layer Pd membrane with the thickness of about 2.5μm was successfully prepared by micro-fabrication technology. The H permeation of the as-prepared Pd membrane was investigated at 473 to 673K under H trans-membrane pressures of 40kPa. The H permeation of Pd membrane with a thickness of 0.70mm was also carried out for comparison. It was found that the H permeability of the 2.5μm-thick Pd membrane was about half of that of the 0.7mm-thick Pd membrane. Surface resistance was less significant in H permeation through the thin micro-fabricated Pd membrane than thin Pd membranes supported by porous materials. Grain growth was observed in the thin micro-fabricated Pd membrane upon H permeation.

Characterization and Permeation of Microfabricated Palladium Membrane. Y.Zhang, J.Lu, T.Ikehara, R.Maeda, C.Nishimura: Materials Transactions, 2006, 47[2], 255-8