The N diffusion in steel was enhanced by previous atomic attrition with low-energy Xe ions. The noble gas bombardment generates nanoscale texture surfaces and stress in the material. The atomic attrition increased N diffusion at lower temperatures than the ones normally used in standard processes. The stress caused binding energy shifts of the Xe 3d5/2 electron core level. The heavy ion bombardment control of the texture and stress of the material surfaces could be applied to several plasma processes where diffusing species were involved.

Enhanced Nitrogen Diffusion Induced by Atomic Attrition. E.A.Ochoa, C.A.Figueroa, T.Czerwiec, F.Alvarez: Applied Physics Letters, 2006, 88[25], 254109 (3pp)