It was demonstrated that grazing-incidence X-ray scattering methods could be used as a non-destructive means for detecting extrinsic stacking faults. Atomistic analysis of diffuse intensity streaks was used to determine the size of the faults, the minimum size at which the streak pattern in the scattering would be visible and the magnitude of the atomic displacements at the center of the stacking fault.

Diffuse X-Ray Streaks from Stacking Faults in Si Analyzed by Atomistic Simulations K.Nordlund, U.Beck, T.H.Metzger, J.R.Patel: Applied Physics Letters, 2000, 76[7], 846-8