It was shown that visual inspection of etch-pit distributions was insufficient, and that a quantitative comparison with random distributions was more informative. This was achieved by comparison with a Poisson distribution and by using normalized radial dislocation density plots. The first step yielded the type of distribution, and the second indicated the characteristic sub-grain tilt-angle of the sample. Examples were given for melt- and vapor-grown CdTe.

Methods of dislocation distribution analysis and inclusion identification D.Rose, K.Durose, W.Palosz, A.Szczerbakow, K.Grasza: Journal of Physics D, 1998, 31[8], 1009-16