It was recalled that previous electron paramagnetic resonance studies of oxidized 6H-type material had revealed a defect center that was present after oxidation and dry heat-treatment. The spectroscopic and annealing characteristics of this center indicated that it was probably a C dangling bond which was made EPR-active by the release of a H species during dry heat-treatment. A study was made here of the effects that various oxidation parameters had upon the density of the centres which were produced. It was found that the termination mechanisms of the oxidation process had the largest effect upon the concentration of centres.

Effects of Oxidation Conditions on the Concentration of Carbon Dangling Bonds in Oxidized 6H-SiC P.J.Macfarlane, M.E.Zvanut: Materials Science Forum, 2000, 338-342, 1125-8