White synchrotron beams, with a wavefront which was limited by a 5μm slit, were used to obtain Bragg-case sectional patterns for substrates and epitaxial layers. The images contained various interference fringes: such as the Uragami type, and ones which were caused by crystal curvature. Systems of fringes which were connected with individual defects were also observed. The experimental images were compared with simulated images which had been obtained by numerical integration of the Takagi-Taupin equations. Reasonably good agreement was found for dislocations which were inclined to the surface, and for misfit dislocations.

Numerical Simulation of Bragg-Case Section Topographic Images of Dislocations in Silicon W.Wierzchowski, K.Wieteska, W.Graeff: Journal of Physics D, 2000, 33[10], 1230-8