The 18O tracer diffusion method was used to investigate O diffusion in reactively dc-sputtered IrO2 films. The profile measurements were done by secondary ion mass spectrometry. For the investigation of O diffusivity in the samples, temperatures ranging from 600 to 765C were used (figure 18). The O tracer diffusion in IrO2 films was found to be described by:

D (m2/s) = 2.8 x 10-6 exp[-2.73(eV)/kT]

It was also shown that the extrinsic O diffusion was strongly influenced by the film preparation conditions, which was especially important for the application of IrO2 films as O barriers.

Oxygen Tracer Diffusion in IrO2 Barrier Films. C.U.Pinnow, I.Kasko, N.Nagel, T.Mikolajick, C.Dehm, F.Jahnel, M.Seibt, U.Geyer, K.Samwer: Journal of Applied Physics, 2002, 91[3], 1707-9

Figure 18

   Diffusion of 18O in IrO2

Table 106

Electrochemical Diffusion of Li in Hexagonal Bronzes

 

Bronze

x

D (cm2/s)

LixWO3

0.48

1.48 x 10-8

LixWO3

1.13

1.07 x 10-10

LixK0.20WO3

0.01

4.07 x 10-8

LixK0.20WO3

0.12

4.07 x 10-10

LixK0.20WO3

0.19

3.80 x 10-10

LixK0.20WO3

0.33

9.12 x 10-9

LixK0.20WO3

0.49

1.35 x 10-10

LixK0.20WO3

0.54

3.24 x 10-9

LixK0.20WO3

0.61

2.75 x 10-10

LixK0.20WO3

0.65

2.82 x 10-10

LixK0.26WO3

0.13

3.24 x 10-9

LixK0.26WO3

0.33

1.35 x 10-9

LixNa0.20WO3

0.03

1.29 x 10-9

LixNa0.20WO3

0.07

2.19 x 10-11

LixNa0.20WO3

0.12

1.05 x 10-10

LixNa0.20WO3

0.16

1.51 x 10-10

LixNa0.20WO3

0.20

3.02 x 10-10

LixNa0.20WO3

0.24

6.31 x 10-10

LixNa0.20WO3

0.28

1.55 x 10-9

LixNa0.20WO3

0.32

2.00 x 10-9

LixNa0.30WO3

0.05

5.13 x 10-14

LixNa0.30WO3

0.10

1.48 x 10-12

LixNa0.30WO3

0.16

2.75 x 10-12

LixNa0.30WO3

0.23

5.89 x 10-12

LixNa0.30WO3

0.29

3.47 x 10-11

LixNa0.30WO3

0.34

5.50 x 10-11

LixNa0.30WO3

0.40

6.17 x 10-11

LixNa0.30WO3

0.45

4.68 x 10-11