The diffusivity of Cl in vapor-deposited silica layers at between 1000 and 2000C was described by:

D(cm2/s) = 2.81 x 10-4 exp[-211(kJ/mol)/RT]

J.Kirchhof, S.Unger, K.F.Klein, B.Knappe: Journal of Non-Crystalline Solids, 1995, 181[3], 266-73