The diffusion profiles of Cl in silica glass were determined by means of canning electron microscopy. It was found that the diffusion data could be described by:

Log[D(cm2/s)] = -11080K/T – 3.498

W.Hermann, H.Rau, J.Ungelenk: Berichte der Bunsengesellschaft für Physikalische Chemie, 1985, 89[4], 423-6