The crystallization behavior of evaporated mixed-composition films was studied. All of the co-deposited films with 15 to 90mol%TiO2, which were annealed at temperatures of between 600 and 900C, crystallized in the anatase phase. The crystallite size increased

with Ti content and with temperature. The TiO2 in layered films, which had layer thicknesses of between 6.5 and 100nm, crystallized in the anatase phase at temperatures of between 400 and 600C; with thin layered films requiring higher temperatures for crystallization. At temperatures of between 900 and 1100C, co-deposited films transformed into rutile films, whereas alternating layered films remained as anatase. The diffusivity of Ti in the mixed-composition film was deduced to be 3 x 10-14 and 3 x 10-13 cm2/s, from studies of the precipitation kinetics at 950 and 1050C, respectively.

H.Sankur, W.Gunning: Journal of Applied Physics, 1989, 66[10], 4747-51

Table 201

Diffusion of O in Titanite under Dry Conditions

continued

Table 201 (continued)

Diffusion of O in Titanite under Dry Conditions