Studies of N implantation in an Fe alloy, using photo-emission electron spectroscopy, sputtered neutral mass spectrometry and elastic recoil detection analysis, revealed an enhancement of N diffusion when D replaced H in the gas. When compared with H, D reduced NOx species on the surface (geometrical barrier), increased the N activity at the surface and thus N diffusion into the solid solution.

Nitrogen Diffusion Enhancement in a Ferrous Alloy by Deuterium Isotopic Effect. C.A.Figueroa, T.Czerwiec, C.Driemeier, I.J.R.Baumvol, S.Weber: Journal of Applied Physics, 2007, 101[11], 116106