Both intrinsic and extrinsic defects of hafnium oxide films were investigated based on photoluminescence and cathodoluminescence  measurements. Instead of using the high-power synchrotron radiation or ArF excimer laser sources, a hydrogen-deuterium lamp (HDL) was used for the photoluminescence measurements to avoid the possible generation of active O and hydroxyl ions. Results show that the HDL photoluminescence spectra generally agree with those registered using the conventional high-power excitation sources. cathodoluminescence spectra also agree with the photoluminescence ones. Narrow emission band at peak energy of 4.0eV, which was ascribed to the vibronic transition of excited OH·* radical, was found using photoluminescence excitation and at energy of 4.25eV.

Luminescence of Intrinsic and Extrinsic Defects in Hafnium Oxide Films. A.A.Rastorguev, V.I.Belyi, T.P.Smirnova, L.V.Yakovkina, M.V.Zamoryanskaya, V.A.Gritsenko, H.Wong: Physical Review B, 2007, 76[23], 235315 (6pp)