The monolayer growth of Nb-doped SrTiO3 on SrTiO3 (100) substrate was prepared by a pulsed laser deposition method. The growth and annealing of the film in vacuum and in O ambient were monitored in real time by an oblique-incidence optical reflectivity difference technique and reflection high-energy electron diffraction technique. The films annealed in different ambient result in different optical annealing signals. From a comparison of experimental optical reflectivity difference signals with simulated optical reflectivity difference signals, it was proved that the optical technique could easily decide whether the O vacancies were moving into or moving out of the film during annealing. The optical signals were found to be composed of contributions from step edges and terraces.

Movement of Oxygen Vacancies in Oxide Film during Annealing Observed by an Optical Reflectivity Difference Technique. X.Wang, K.Jin, H.Lu, Y.Fei, X.Zhu, G.Yang: Journal of Applied Physics, 2007, 102[5], 053107