Ab initio calculations were performed in order to study P diffusion in Ge via vacancy and interstitial-mediated mechanisms as well as a correlated exchange mechanism without interaction with a mediating defect. It was found that the most favorable diffusion mechanism was sensitive to the position of the Fermi level within the band gap. For material with a mid-gap Fermi level, the neutral or singly positive P interstitial was the dominant diffusing species, while in n-type material, it was the doubly negative P-vacancy complex. For a Fermi level position of Ev+0.5eV, a barrier for P diffusion via the doubly negative P-vacancy defect of ~2.5eV was calculated, which was roughly 1eV below the equivalent process in Si.
Ab Initio Investigation of Phosphorus Diffusion Paths in Germanium. C.Janke, R.Jones, S.Öberg, P.R.Briddon: Physical Review B, 2008, 77[19], 195210 (7pp)
Table 5
Diffusivity of Be in Ge0.65Si0.35
Temperature (C) | D (m2/s) |
565 | 1.70 x 10-20 |
600 | 1.62 x 10-19 |
640 | 1.18 x 10-19 |
690 | 1.60 x 10-18 |
715 | 7.00 x 10-18 |
720 | 3.95 x 10-18 |
Table 6
Diffusivity of Be in Ge0.20Si0.80
Temperature (C) | D (m2/s) |
505 | 2.70 x 10-20 |
535 | 3.70 x 10-19 |
560 | 4.90 x 10-19 |
590 | 1.33 x 10-18 |
Figure 2
Diffusivity of Co, Cr and Fe in Ge
(Squares: Co, circles; Fe; triangles, Cr)