Promoted by Si enrichment during the formation of the reconstructed (√3 x √3)R30° phase on hexagonal SiC(00•1) a cubic stacking sequence develops at the surface. The reconstruction was ultimately resolved to consist of Si adatoms in T4 sites as found by quantitative low-energy electron diffraction crystallography. Prior to the (√3 x √3)R30° phase evolution mesa-like structures with various atomic periodicities were observed by scanning tunnelling microscopy. Smoothening of this rough and Si enriched state provides the material for the formation of the modified stacking sequence which could serve as seed for preparation of SiC polytype heterostructures.

Stacking Transformation from Hexagonal to Cubic SiC Induced by Surface Reconstruction - a Seed for Heterostructure Growth. U.Starke, J.Schardt, J.Bernhardt, M.Franke, K.Heinz: Physical Review Letters, 1999, 82, 2107-10