Following previous work on producing successful 3-dimensional tomographic reconstructions of dislocations from conventional weak-beam dark-field images, a cascade of dislocations in deformed and annealed Si was reconstructed to a comparable standard by using the more experimentally straightforward technique of STEM annular dark-field imaging. In this mode, image contrast was much more consistent over the specimen tilt range than it was in conventional weak-beam dark-field imaging. Automatic acquisition software could restore the correct dislocation array to the field-of-view at each tilt angle, although manual focusing was still required. Reconstruction was carried out, via a sequential iterative reconstruction technique. The dislocations were found to be distributed non-uniformly along cascades, with sparse areas between denser clumps in which individual dislocations with an in-plane image width of 24nm could be distinguished in images and reconstructions. Denser areas exhibited a more complicated stacking-fault contrast; thus hampering tomographic reconstruction. The general three-dimensional form of the denser areas was reproduced well, showing that the dislocation array was planar and not parallel to the foil surfaces.

Dislocation Tomography Made Easy - a Reconstruction from ADF STEM Images Obtained using Automated Image Shift Correction. J.H.Sharp, J.S.Barnard, K.Kaneko, K.Higashida, P.A.Midgley: Journal of Physics - Conference Series, 2008, 126[1], 012013