A theoretical X-ray diffraction model, starting from the Takagi-Taupin equation, was developed for describing coherent and diffuse components of the rocking-curve obtained from a multilayered crystal structure with randomly distributed Coulomb-type defects in all of the layers, and the substrate. The model described both the diffuse scattering intensity distribution and the influence of diffuse scattering upon the attenuation and angular redistribution of the coherent X-ray scattering intensity. By analyzing the total measured rocking curve, using the proposed diffraction model, the chemical compositions, strains and characteristics of dislocation loops in the layers and substrate of a multilayered structure with a single quantum well were determined.

X-Ray Diffuse Scattering Effects from Coulomb-Type Defects in Multilayered Structures. S.I.Olikhovskii, V.B.Molodkin, E.S.Skakunova, E.N.Kislovskii, I.M.Fodchuk: Physica Status Solidi A, 2009, 206[8], 1790-4