A full-field X-ray micro-diffraction technique was developed which simultaneously provided both micrometer-resolution information on crystalline perfection as well as statistical information concerning the macroscopically illuminated sample. The method permitted the detailed characterization of patterned substrates grown by epitaxial lateral overgrowth. Local wing tilts, and their fluctuation over the sample area, as well as the local and average numbers of grains in the wings were determined and the reduction in threading dislocation densities in the grains of the wings could be quantitatively estimated.

Microdiffraction Imaging of Dislocation Densities in Microstructured Samples. D.Lübbert, T.Baumbach, V.Holý, P.Mikulík, L.Helfen, P.Pernot, M.Ellyan, S.Keller, T.M.Katona, S.P.DenBaars, J.S.Speck: EPL, 2008, 82, 56002