A non-destructive determination was made of dislocation type and Burgers vector

direction in GaN by using electron channelling contrast imaging within a scanning

electron microscope. Fore-scattered electron intensity fluctuations generated by

threading dislocations exhibited characteristic spatial profiles indicative of

dislocation type (screw, edge) and Burgers vector direction. Simulated channelling

contrast features by two-beam dynamical diffraction calculations indicated

qualitative agreement with recorded images. Fore-scattered electron channelling

contrast imaging sensitivity to atomic steps and low-angle grain boundaries in GaN

permitted additional confirmation. Resolving the Burgers Vector for Individual GaN Dislocations by Electron

Channeling Contrast Imaging. Y.N.Picard, M.E.Twigg, J.D.Caldwell, C.R.Eddy,

M.A.Mastro, R.T.Holm: Scripta Materialia, 2009, 61[8], 773-6