Nonpolar (11–20) GaN films with different basal-plane stacking fault (BSF)
densities (determined using transmission electron microscopy) were investigated
using X-ray diffraction. Diffuse streaking from I1 and I2 BSFs was observed in
reciprocal space maps of the 10–10 and 20–20 reflections. X-ray calibration curves
for BSF density determination can be plotted using the diffusely scattered intensity
of open detector 10–10 or 20–20 ω-scans measured at a fixed, large separation
from the peak maximum. However, ab initio determination of stacking fault
densities was not possible due to additional broadening from other defects.
Similarly, ω-scan peak widths were poor indicators of BSF densities.
Investigating Stacking Faults in Nonpolar Gallium Nitride Films Using X-Ray
Diffraction. M.A.Moram, C.F.Johnston, M.J.Kappers, C.J.Humphreys: Physica B,
2009, 404[16], 2189-91