Investigations of activation energy barriers for Al surface hopping on α-Al2O3
(00•1) surfaces were carried out by means of first-principles density functional
theory calculations and the nudged elastic band method. Results showed that
surface diffusion on the (most stable) Al-terminated surface was relatively fast,
with an energy barrier of 0.75eV, whereas Al hopping on the O-terminated surface
was slower; with barriers for jumps from the two metastable positions on this
surface, to the stable site, of 0.31 and 0.99eV. Based upon this study and upon
literature data, the governing mechanisms during low-temperature α-alumina thin
film growth were summarized. The results supported the suggestions made in some
previous experimental studies, which pointed out that limited surface diffusivity
was not the main obstacle to α-alumina growth at low-to-moderate temperatures,
and that other effects should be considered first when designing new processes for
low-temperature α-alumina deposition.
Low-Temperature α-Alumina Thin Film Growth: Ab Initio Studies of Al Adatom
Surface Migration. E.Wallin, E.P.Münger, V.Chirita, U.Helmersson: Journal of
Physics D, 2009, 42[12], 125302