High quality SrTiO3 thin film on (110) DyScO3 substrate was grown by laser

molecular beam epitaxy. The lattice strain resulting from the lattice mismatch

between the substrate and the film relaxes gradually with depth. A critical

thickness of about 30nm for sharp strain relaxation was observed. The dislocation

density, which forms to relax the lattice strain, was estimated to be about 108 cm−2

according to the high resolution X-ray diffraction. The edge dislocation density

was slightly larger than that of the screw ones.

Dislocation Density and Strain Distribution in SrTiO3 Film Grown on (110)

DyScO3 Substrate. Z.Y.Zhai, X.S.Wu, H.L.Cai, X.M.Lu, J.H.Hao, J.Gao, W.S.Tan,

Q.J.Jia, H.H.Wang, Y.Z.Wang: Journal of Physics D, 2009, 42[10], 105307