Lithium meta-silicate thin film was fabricated on various insulating substrate by

pulsed laser deposition. By X-ray diffraction measurement, as-prepared thin film

was found to be amorphous structure. Temperature dependence of the ionic

conductivity was measured at 500 to 700K. It was found that the ionic conductivity

depended on the substrate species and in-plane direction. The substrate dependence

of ionic conduction of amorphous thin films may originate from the structural

modulation of the thin film at the vicinity of the hetero-interface.

Fabrication and Ionic Conductivity of Li2SiO3 Thin Film. S.Furusawa, T.Kasahara,

A.Kamiyama: Solid State Ionics, 2009, 180[6-8], 649-53