The rate of decomposition of a solid solution of Au in n-type Si with a dislocation density of 104/cm2 was studied. The Au concentration was determined by means of Hall effect and resistivity measurements. Over the range of 500 to 700C, the diffusion of Au could be described by D(cm2/s) = 1 x 100exp[-l.57(eV)/kT]
A.Z.Badalov: Fizika i Tekhnika Poluprovodnikov, 1972, 6[5], 789-92
Table 10
Diffusivity of Au in Amorphous Si
Temperature (C) | D (cm2/s) |
800 | 4.5 x 10-11 |
695 | 5.8 x 10-12 |
595 | 1.0 x 10-12 |
495 | 5.4 x 10-14 |
395 | 2.2 x 10-15 |