A survey was made of isothermal diffusivity values for B in Si. It was noted that the standard error in the evaluation of the logarithm of the pre-exponential was directly proportional to the standard error in the evaluation of the activation energy. The constant in this proportionality was 8.3. Also, a statistical relationship existed between the above parameters, for B diffusing in Si, and the fact that this relationship was characterized by a correlation factor of 0.99 supported its linearity. It was further noted that, by expressing the pre-exponential factor in terms of the activation energy, it was possible to exclude it from the equation for the temperature dependence of the diffusion coefficient. This revealed the existence of an unambiguous relationship between the isothermal diffusion coefficient and the activation energy for B diffusion in Si. Experimental data for the latter system were shown to be satisfactorily described by the single equation,

ln[D] = -28 - [1/kT - 8.17]Q

D.Rakhimbaev, A.Avezmuradov, M.D.Rakhimbaeva: Neorganicheskie Materialy, 1994, 30[4], 442-8 (Inorganic Materials, 1994, 30[4], 418-23)

Table 29

Enhanced Diffusivity of B in Si