It was found that the C diffusivity at between 1070 and 1400C could be described by:

D(cm2/s) = 3.3 x 10-1exp[-2.92(eV)/kT]

The Diffusivity of Carbon in Silicon. R.C.Newman, J.Wakefield: Journal of the Physics and Chemistry of Solids, 1961, 19, 230