The behavior of type-3d transition metal impurities was investigated by using deep-level transient spectroscopic and Hall-effect measurements. Electrically active components were attributed to interstitial species. Pairs of the donors with B, acting as donors, were also detected. The diffusivity of Fe, at temperatures ranging from 273 to 1343K, was described by:

D(cm2/s) = 1.1 x 10-3exp[-0.66(eV)/kT]

H.Nakashima, T.Sadoh, H.Kitagawa, K.Hashimoto: Materials Science Forum, 1994, 143-147, 761-6

Table 39

Diffusion of Fe in Amorphous Hydrogenated Si