Using coherent neutron scattering and secondary ion mass spectrometry techniques, it was found that atomic D which was introduced into amorphous hydrogenated material (from a plasma) diffused fast interstitially and replaced bonded H atoms. The effective diffusion coefficient was estimated to be about 10-14cm2/s. This was much larger than that for bond-breaking diffusion, which was equal to about 10-20cm2/s at 160C.

B.Abeles, L.Yang, D.Leta, C.Majkrzak: Journal of Non-Crystalline Solids, 1987, 97-98, 353-6

 

Table 51

Diffusivity of H in Si

 

Temperature (C)

D (cm2/s)

57

5.3 x 10-10

57

3.1 x 10-10

52

2.5 x 10-10

42

2.6 x 10-10

22

1.3 x 10-10

10

8.1 x 10-11

4

6.2 x 10-11

0

3.8 x 10-11

0

3.0 x 10-11