The elastic recoil detection method was used to measure the dispersion parameter for H diffusion in undoped hydrogenated amorphous material. It was found that decreasing the deposition temperature of the films increased the value of the dispersion parameter. This variation could also be clearly related to the increase in the initial concentration of weakly bound H. This was expected to reflect disorder in the microstructure. The results were expected to contribute to the elucidation of the dispersive character of H diffusion (table 63) in various types of amorphous material.
Dispersive Diffusion of Hydrogen in a-Si:H: Influence of the Film Deposition Temperature. X.M.Tang, J.Weber, Y.Baer, F.Finger: Physical Review B, 1990, 41[11], 7945-7
Table 61
Diffusivity of H in Doped Amorphous Si
B | P | Temperature (C) | D (cm2/s) |
0.01 | - | 272 | 9.7 x 10-14 |
0.01 | - | 242 | 3.0 x 10-14 |
0.01 | - | 201 | 1.7 x 10-15 |
0.001 | - | 301 | 1.4 x 10-13 |
0.001 | - | 273 | 5.3 x 10-14 |
0.001 | - | 177 | 1.5 x 10-16 |
0.001 | - | 156 | 3.0 x 10-17 |
0.0001 | - | 273 | 1.4 x 10-14 |
0.0001 | - | 242 | 1.9 x 10-15 |
0.0001 | - | 199 | 1.5 x 10-16 |
0.001 | 0.0001 | 272 | 2.5 x 10-15 |
0.001 | 0.0001 | 240 | 3.0 x 10-16 |
0.001 | 0.0001 | 200 | 3.2 x 10-17 |
- | 0.001 | 300 | 2.8 x 10-15 |
- | 0.001 | 272 | 1.1 x 10-15 |
- | 0.001 | 251 | 3.3 x 10-16 |
- | 0.001 | 201 | 2.0 x 10-17 |
- | 0.0001 | 272 | 6.1 x 10-16 |
- | 0.0001 | 240 | 1.4 x 10-16 |
- | 0.0001 | 199 | 1.1 x 10-17 |
- | 0.0001 | 199 | 6.6 x 10-18 |
- | 0.00001 | 272 | 2.0 x 10-16 |
- | 0.00001 | 240 | 3.7 x 10-17 |
Table 62
Effect of P and As upon H Diffusion in Si
Dopant | Level | D (cm2/s) |
As | 0.0001 | 4 x 10-17 |
As | 0.001 | 8 x 10-17 |
As | 0.01 | 4 x 10-16 |
P | 0.0001 | 1.2 x 10-16 |
P | 0.001 | 2 x 10-16 |
P | 0.01 | 2 x 10-16 |
Table 63
Diffusivity of H in Amorphous Hydrogenated Si
Tann (C) | tann (h) | D (cm2/s) |
50 | 0.5 | 5.9 x 10-15 |
100 | 0.5 | 8.0 x 10-15 |
150 | 0.5 | 1.1 x 10-14 |
200 | 0.5 | 1.3 x 10-14 |
250 | 0.5 | 2.0 x 10-14 |
50 | 1 | 4.1 x 10-15 |
100 | 1 | 6.0 x 10-15 |
150 | 1 | 8.8 x 10-15 |
200 | 1 | 9.9 x 10-15 |
250 | 1 | 1.8 x 10-14 |
50 | 1.5 | 3.2 x 10-15 |
100 | 1.5 | 4.5 x 10-15 |
150 | 1.5 | 7.6 x 10-15 |
200 | 1.5 | 8.6 x 10-15 |
250 | 1.5 | 1.5 x 10-14 |
Table 64
Diffusivity of Various H Species in n-Type and p-Type Si
Species | Type | Temperature (C) | D (cm2/s) |
Ho | p | 185 | 5.0 x 10-12 |
Ho | p | 185 | 3.6 x 10-12 |
Ho | p | 185 | 4.0 x 10-12 |
Ho | p | 165 | 7.5 x 10-13 |
Ho | p | 150 | 3.6 x 10-13 |
Ho | p | 150 | 3.5 x 10-13 |
Ho | p | 145 | 2.5 x 10-13 |
Ho | p | 120 | 4.0 x 10-14 |
H+ | p | 185 | 3.0 x 10-11 |
H+ | p | 185 | 1.0 x 10-12 |
H+ | p | 185 | 1.3 x 10-14 |
H+ | p | 165 | 1.3 x 10-11 |
H+ | p | 150 | 8.0 x 10-12 |
H+ | p | 150 | 5.5 x 10-13 |
H+ | p | 145 | 6.0 x 10-13 |
H+ | p | 120 | 2.5 x 10-12 |
Ho | n | 120 | 4.0 x 10-14 |
Ho | n | 150 | 3.6 x 10-13 |
H- | n | 150 | 4.0 x 10-12 |
H- | n | 120 | 7.5 x 10-13 |
H- | n | 120 | 1.0 x 10-13 |
H- | n | 120 | 5.0 x 10-15 |