The core structure of threading dislocations in AlN films was investigated by atomic-resolution scanning transmission electron microscopy. The threading dislocations in the AlN films were found to be mostly edge-type perfect dislocations. It was directly revealed that the edge dislocation core had the 8-atom ring structure which was an energetically favourable structure predicted by previous theoretical studies.

Atomic Structure of Threading Dislocations in AlN Thin Films. Y.Tokumoto, N.Shibata, T.Mizoguchi, T.Yamamoto, Y.Ikuhara: Physica B, 2009, 404[23-24], 4886-8