A nanoporous semi-polar GaN template was fabricated by using photo-enhanced electrochemical etching to obtain porous GaN with nanoscale pores. The surface morphology of re-grown semi-polar GaN on a nanoporous GaN template was enhanced by surface modification. Cross-sectional transmission electron microscopic images revealed reductions in the densities of dislocations and basal stacking faults at the re-grown interface. Photoluminescence measurement also revealed that the crystallinity of re-grown GaN was improved by reducing the density of defects.

Regrowth of Semipolar GaN on Nanoporous GaN Template by Metal Organic Chemical Vapor Deposition. J.H.Lee, M.J.Wang, B.H.Kong, H.K.Cho, O.Nam: Japanese Journal of Applied Physics, 2010, 49[5], 058001