A different Pd-related defect from a substitutional Pd with (C2v) symmetry was detected by ESR measurement. New ESR signal of the Pd-related defect showed different g-value and symmetry from those of the substitutional Pd. The Pd-related defect had the  anisotropic character of monoclinic (C1h) symmetry. The calculated g-values were g1=1.97, g2=2.03, g3=2.16, and the g1 axis was along the <110> direction. The g2 and g3 axes were perpendicular to the g1 axis, and the g2 axis was rotated from <100> to <111> direction at the angle of 51°. In addition to the Pd-related defect, other ESR signals in Pd and hydrogen-diffused Si were found. The ESR signals showed the hyperfine structure of hydrogen. Therefore, it was suggested that the ESR signals originated from Pd–H complex defects.

Electron Spin Resonance of Palladium-Related Defect in Silicon. T.Ishiyama, S.Kimura, Y.Kamiura, Y.Yamashita: Physica B, 2009, 404[23-24], 4586-9