It was found that the O diffusivity over an ungiven temperature range could be described by:

D(cm2/s) = 2.3 x 10-1exp[-2.56(eV)/kT]

The Configuration and Diffusion of Isolated Oxygen in Silicon and Germanium. J.W.Corbett, R.S.McDonald, G.D.Watkins: Journal of the Physics and Chemistry of Solids, 1964, 25, 873