The methods of p-n junction measurement and radioactive tracer analysis were used to study the diffusion of P in single crystals at various impurity surface concentrations. The data for P diffusion in single crystals (table 82) could be described by:

D(cm2/s) = 1 x 103exp[-4.29(eV)/kT]

V.A.Uskov, P.V.Pavlov, E.V.Kurilchik, V.I.Pashkov: Fizika Tverdogo Tela, 1970, 12[5], 1504-10