Using differential sheet conductance and p-n junction methods, an investigation was made of the diffusion of Sb into epitaxial layers from buried layers. At between 1150 and 1250C, no significant decrease in the diffusion coefficient with increases in surface concentration from 4.4 x 1018 to 1.2 x 1019/cm3 was observed, and the diffusivity of Sb could be described by:

D(cm2/s) = 3.63 x 102exp[-4.41(eV)/kT]

S.Nakanuma, S.Yamagishi: Journal of the Electrochemical Society of Japan, 1968, 36[1], 3-10