Neutron activation analysis was used to study the diffusion of Au into Si single crystals of various specimen thicknesses, O concentrations, and dislocation densities. From the results, it was deduced that the interstitial Au atoms present in Si were in thermal equilibrium with the Si matrix. The experimental results were analyzed to yield a Si self-diffusion activation energy of 4.5eV. This was equal to that reported by a study of the dissociative diffusion of Ni in Si.

Dissociative Diffusion of Gold in Silicon. M.Yoshida, K.Saito: Japanese Journal of Applied Physics, 1970, 9[10], 1217-28