Three-dimensional finite element simulations were made of the mechanical response of passivated single crystal copper thin films with a continuum crystal plasticity model. The model introduces the formation of high density dislocation layers close to the substrate and passivation interfaces obtained from dislocation dynamics simulations. These dislocation structures were responsible for an increase in strain hardening as the film thickness decreases. The model predicts an increase in strain hardening as the film thickness decreases in agreement with experimental observation in films with thickness in the range 0.2 to 2 µm.

A Continuum Plasticity Model That Accounts for Hardening and Size Effects in Thin Films. A.Hunter, H.Kavuri, M.Koslowski: Modelling and Simulation in Materials Science and Engineering, 2010, 18[4], 045012