Calculations were made of the x-ray diffraction peak profiles from distributions of misfit dislocations over the entire range of their positional correlations; from completely random to periodic. Both the spatial integration and the integration over the dislocation ensemble were performed by Monte Carlo techniques. The diffraction peaks from thin relaxed films consisting of a narrow coherent and a broad diffuse component were explained. Correlation functions were calculated analytically for different types of positional correlations between dislocations.

X-Ray Diffraction Peaks from Partially Ordered Misfit Dislocations. V.M.Kaganer, K.K.Sabelfeld: Physical Review B, 2009, 80[18], 184105