Diffusion into Cl-doped material, from the vapour phase, was studied at 470 to 970K. The diffusivity was determined by means of layer-stripping and Hall-effect measurements. It was found that the results depended upon the hole concentration of the samples (figure 12). The data could be described by:

D (cm2/s) = 1.17 x 100 exp[-1.68eV)/kT]

when the hole concentration was between 1016 and 2 x 1016/cm3, by the expression:

D (cm2/s) = 1.4 x 10-1 exp[-1.98eV)/kT]

when the hole concentration was between 1016 and 2 x 1016/cm3, and by:

D (cm2/s) = 4.02 x 10-6 exp[-0.46eV)/kT]

when the hole concentration was between 109 and 1010/cm3.

J.M.Ivanov, G.S.Pavlova, E.L.Kanunova: Izvestiya Akademii Nauk SSSR – Neorganicheskie Materialy, 1988, 24[12], 1959-62