Changes in the electrical conductivity of In-bombarded samples, which occurred during annealing, were monitored. From these data, it was deduced that the diffusivity of In at around 200C could be described by:
D (cm2/s) = 4 x 10-2 exp[-0.9(eV)/kT]
Diffusion of Admixtures Introduced by Ion Bombardment. A.E.Gorodetskii, G.A.Kachurin, L.S.Smirnov: Diffuz. Poluprovodnikov, 1969, 72-80