The diffusion of O in undoped monocrystalline material was studied by probing the diffused crystals with a laser, and subjecting the ejecta to mass spectroscopy. The O distributions were then used to deduce the diffusion parameters:

p- and n-type, 650-900C:     D (cm2/s) = 6.0 x 10-10 exp[-6.6(kcal/mol)/RT]

p-type, 200-650C:     D (cm2/s) = 2.0 x 10-9 exp[-19(kcal/mol)/RT]

n-type, 200-650C:     D (cm2/s) = 5.6 x 10-9 exp[-29(kcal/mol)/RT]

Diffusion of O into CdTe Studied using the Mass-Spectroscopic Micro-Analyser. F.F.Vodovatov, G.V.Indenbaum, A.V.Vanyukov: Fizika Tverdogo Tela, 1970, 12[1], 22-5