The Zn was diffused, from the vapour phase, into specimens which were held at 500 to 540C. The diffusion behaviour exhibited good reproducibility and a flat diffusion front was obtained. The data could be described by:

D(cm2/s) = 4 x 10-2 exp[-1.6(eV)/kT]

T.Kagawa, G.Motosugi: Japanese Journal of Applied Physics, 1981, 20[3], 597-600