600-900C, D(cm2/s) = 12.7 exp[-2.3(eV)/kT]

Diffusion of Impurities in Germanium. W.C.Dunlap: Physical Review, 1954, 94, 1531-40


As diffusion Ge As diffusion

 

 

Table 32

Diffusivity of As in Ge

 

Temperature (C)

Donor Concentration (/cm3)

D (cm2/s)

640

1.3 x 1017

3.2 x 10-14

640

2.3 x 1019

3.4 x 10-14

680

1.9 x 1017

1.5 x 10-13

680

3.6 x 1019

1.9 x 10-13

730

5.0 x 1017

8.8 x 10-13

730

2.5 x 1018

1.1 x 10-12

730

5.7 x 1019

7.7 x 10-13

770

1.1 x 1018

3.1 x 10-12

770

6.5 x 1019

2.2 x 10-12

820

1.1 x 1017

9.5 x 10-12

820

5.8 x 1019

9.6 x 10-12

868

8.8 x 1017

3.2 x 10-11

868

3.0 x 1019

4.5 x 10-11

920

1.3 x 1018

1.1 x 10-10

920

8.6 x 1018

1.3 x 10-10