A direct method was developed for the calculation of low-energy electron diffraction reflection intensity profiles via the kinematic approximation. Surface relief was modelled by using Monte Carlo techniques, and was applied to the equilibrium relief created by bombarding vicinal surface with Ar ions. From the results, the diffusivity of Ge on the (111) surface was found to be described by:

D(cm2/s) = 1.4 x 10-9 exp[-1.0(eV)/kT]

A.A.Shklyaev, S.M.Repinski: Fizika i Tekhnika Poluprovodnikov, 1980, 14[7], 1300-5