It was found that the data could be described by:
D (cm2/s) = 5.07 x 102 exp[-2.8(eV)/kT]
G.N.Wills: Solid-State Electronics, 1967, 10, 1-10
Table 37
Diffusivity of Sb on the (111) Plane of Ge
as a Function of Temperature and Coverage
Coverage | Temperature (C) | D (cm2/s) |
0.05 | 650 | 3.0 x 10-8 |
0.05 | 620 | 1.1 x 10-8 |
0.05 | 600 | 7.2 x 10-9 |
0.05 | 580 | 4.5 x 10-9 |
0.05 | 560 | 1.6 x 10-9 |
0.05 | 550 | 1.3 x 10-9 |
0.10 | 650 | 1.7 x 10-8 |
0.10 | 630 | 9.5 x 10-9 |
0.10 | 620 | 6.9 x 10-9 |
0.10 | 600 | 4.7 x 10-9 |
0.10 | 580 | 2.5 x 10-9 |
0.10 | 560 | 1.0 x 10-9 |
0.10 | 540 | 7.4 x 10-10 |
0.15 | 650 | 1.4 x 10-8 |
0.15 | 630 | 6.6 x 10-9 |
0.15 | 620 | 4.2 x 10-9 |
0.15 | 600 | 3.3 x 10-9 |
0.15 | 580 | 1.6 x 10-9 |
0.15 | 560 | 7.5 x 10-10 |
0.15 | 540 | 3.9 x 10-10 |
0.20 | 650 | 1.2 x 10-8 |
0.20 | 630 | 4.3 x 10-9 |
0.20 | 620 | 2.7 x 10-9 |
0.20 | 600 | 2.2 x 10-9 |
0.20 | 580 | 9.6 x 10-10 |
0.20 | 560 | 5.2 x 10-10 |
0.20 | 540 | 2.7 x 10-10 |
0.30 | 650 | 6.8 x 10-9 |
Table 37 (continued)
Diffusivity of Sb on the (111) Plane of Ge
as a Function of Temperature and Coverage
Coverage | Temperature (C) | D (cm2/s) |
0.30 | 630 | 2.3 x 10-9 |
0.30 | 620 | 1.4 x 10-9 |
0.30 | 600 | 1.2 x 10-9 |
0.30 | 580 | 4.5 x 10-10 |
0.30 | 560 | 2.5 x 10-10 |
0.30 | 540 | 1.7 x 10-10 |
0.40 | 650 | 2.9 x 10-9 |
0.40 | 630 | 1.5 x 10-9 |
0.40 | 620 | 8.3 x 10-10 |
0.40 | 600 | 6.4 x 10-10 |
0.40 | 580 | 2.1 x 10-10 |
0.40 | 550 | 1.2 x 10-10 |
0.50 | 650 | 1.7 x 10-9 |
0.50 | 630 | 8.0 x 10-10 |
0.50 | 620 | 6.0 x 10-10 |
0.50 | 590 | 3.0 x 10-10 |
0.50 | 570 | 8.1 x 10-11 |
0.50 | 550 | 6.5 x 10-11 |
0.60 | 650 | 1.1 x 10-9 |
0.60 | 630 | 3.9 x 10-10 |
0.60 | 610 | 3.0 x 10-10 |
0.60 | 590 | 1.5 x 10-10 |
0.60 | 570 | 6.0 x 10-11 |
0.60 | 550 | 4.5 x 10-11 |