Initially p-type Cd-doped specimens, with a dislocation density of less than 100/cm2, were studied. The diffusivity at 230 to 490C was determined using layer-by-layer etching and resistivity measurements at liquid nitrogen temperatures. It was found that the data could be described by:
D(cm2/s) = 2.2 x 101 [-1.0(eV)/kT]
V.S.Ivleva, V.I.Selyanina: Fizika i Technika Poluprovodnikov, 1979, 13[11], 2288-90
Table 40
Diffusivity of 114mIn in InSb
Temperature (C) | Diffusivity (cm2/s) |
414 | 1.5 x 10-17 |
435 | 3.6 x 10-17 |
449 | 4.8 x 10-17 |
457 | 5.6 x 10-17 |
477 | 8.9 x 10-17 |
500 | 2.4 x 10-16 |