Williamson-Hall analysis was often used to separate the lateral coherence length broadening and dislocation broadening on the ω-scan with a Lorentzian distribution. However, besides the lateral coherence length broadening and dislocation broadening, curvature also could broaden the ω-scan peak. Usually, the ω-scan could be described by a Pseudo-Voigt function more precisely than a Lorentzian function. Based upon the Pseudo-Voigt fit peak profile, the Williamson-Hall plots were modified. Both lateral coherence length broadening and curvature broadening could be eliminated from (001) ω-scans plots simultaneously, and a reliable tilt could be obtained. This method was a good complement to the existing method, but was more convenient. Although attention was focussed upon GaN layers, the results were applicable to a wide range of other materials having mosaic structures.

Analysis of Modified Williamson-Hall Plots on GaN Layers. J.Q.Liu, Y.X.Qiu, J.F.Wang, K.Xu, H.Yang: Chinese Physics Letters, 2011, 28[1], 016101