La0.5Sr0.5CoO3 films grown on SrTiO3 substrates, cooled at reduced oxygen pressures, ranging from 8 x 104 to 1 x 10−4Pa, from the deposition temperature, were used as the bottom electrodes of PbZr0.4Ti0.6O3 capacitors to study the impact of oxygen stoichiometry of the La0.5Sr0.5CoO3 bottom electrodes on the structural and physical properties of La0.5Sr0.5CoO3/PbZr0.4Ti0.6O3/La0.5Sr0.5CoO3 capacitors. It was found that the tetragonality, polarization and fatigue-resistance of PbZr0.4Ti0.6O3 films decrease with the decrease of the cooling oxygen pressure. Almost 60% polarization degradation occurred for the PbZr0.4Ti0.6O3 capacitor with the La0.5Sr0.5CoO3 bottom electrode cooled in 1 x 10−4 Pa oxygen up to 1010 switching cycles, indicating that the oxygen vacancy of the bottom electrode could result in fatigue of the La0.5Sr0.5CoO3/PbZr0.4Ti0.6O3/La0.5Sr0.5CoO3 capacitor.

Oxygen Vacancy as Fatigue Evidence of La0.5Sr0.5CoO3/ PbZr0.4Ti0.6O3/ La0.5Sr0.5CoO3 Capacitors. B.T.Liu, J.E.Chen, J.Sun, D.Y.Wei, J.H.Chen, X.H.Li, F.Bian, Y.Zhou, J.X.Guo, Q.X.Zhao, L.Guan, Y.L.Wang, Q.L.Guo, L.X.Ma: EPL, 91[6], 67011