The X-ray diffraction peak profiles due to misfit dislocations were studied for the dislocations correlated on distances much smaller than the film thickness. Simple analytical expressions for the correlation parameter were obtained when the dislocations were generated as a Markov chain. Monte Carlo calculations showed the peak profile evolution as order in the dislocation positions increased.

Short Range Correlations of Misfit Dislocations in the X-ray Diffraction Peaks. V.M.Kaganer, K.K.Sabelfeld: Physica Status Solidi A, 2011, 208[11], 2563–6