An amorphous InGaZnO film fabricated by radio frequency magnetron sputtering in only an Ar-reactive gas shows high conductivity, and a thin-film transistors (TFTs)-based IGZO active layer expresses a poor on/off current ratio with a high off current and high sub-threshold swing (SS). This paper presents the post-annealing effects on IGZO thin films to compensate the oxygen deficiencies in films as well as on TFT devices to reduce the densities of the interface trap between the active layer and insulator. The ratio of oxygen vacancies over total of oxygen (O2/Otot) in IGZO estimated by the XPS measurement shows that they significantly diminish from 24.75 to 17.68% when increasing the temperature treatment to 350C, which was related to the enhancement in resistivity of IGZO. The TFT characteristics of IGZO treated in air at 350C show a high ION/IOFF ratio of ~1.1 x 107, a high field-effect mobility of 7.48cm2V−1/s, and a low SS of 0.41Vdec−1. The objective of this paper was to achieve a successful reduction in the interface trap density, ΔDit, which was reduced about 3.1 x 1012cm−2eV−1 and 2.0 x 1012cm−2eV−1 for the 350 and 200C treatment samples compared with the as-deposited one. The resistivity of the IGZO films can be adjusted to the appropriate value that can be used for TFT applications by controlling the treatment temperature.

Improvement in the Performance of an InGaZnO Thin-Film Transistor by Controlling Interface Trap Densities between the Insulator and Active Layer. T.T.Trinh, V.D.Nguyen, K.Ryu, K.Jang, W.Lee, S.Baek, J.Raja, J.Yi: Semiconductor Science and Technology, 2011, 26[8], 085012